Enhanced NO2 Detection in ZnO-Based FET Sensor: Charge Carrier Confinement in a Quantum Well for Superior Sensitivity and Selectivity

NO2 is a toxic gas mainly generated by combustion processes, such as vehicle emissions and industrial activities. It is a key contributor to smog, acid rain, ground-level ozone, and particulate matter, all of which pose serious risks to human health and the environment. Conventional resistive gas sensors, typically based on metal oxide semiconductors, detect NO2 by resistance modulation through surface interactions with the gas. However, they often suffer from low responsiveness and poor selectivity. This study investigates NO2 detection using nanoporous zinc oxide thin films integrated into a resistor structure and floating-gate field-effect transistor (FGFET). Both Silvaco-Atlas simulations and experimental fabrication were employed to evaluate sensor behavior under NO2 exposure. The results show that FGFET provides higher sensitivity, faster response times, and improved selectivity compared to resistor-based devices. In particular, FGFET achieves a detection limit as low as 89 ppb, with optimal performance around 400 °C, and maintains stability under varying humidity levels. The enhanced performance arises from quantum well effects at the floating-gate Schottky contact, combined with NO2 adsorption on the ZnO surface. These interactions extend the depletion region and confine charge carriers, amplifying conductivity modulation in the channel. Overall, the findings demonstrate that FGFET is a promising platform for NO2 sensors, with strong potential for environmental monitoring and industrial safety applications.