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Composition influence on the properties of sputtered Sn-W-O films

COMINI, Elisabetta;FAGLIA, Guido;SBERVEGLIERI, Giorgio;
2003-01-01
2003
Nessuno
PE3_5 Electronic properties of materials and transport
SENSORS AND ACTUATORS. B, CHEMICAL
2-s2.0-0037374743
WOS:000181894400002
Sì, ma tipo non specificato
Inglese
Internazionale
89
225
231
6
Sn-W-O thin films, deposited by rheotaxial growth and thermal oxidation (RGTO) technique, have been investigated. The aim of this work is the compositional and sensing characterization, in order to obtain stable materials for gas sensing. Two kinds of SnO2 based sample are realized: W deposited just after Sn deposition and W deposited on SnO2 already oxidized. The compositional characterization is performed by means of XPS depth profiling technique. Surface topography is studied by means of AFM measurements. Electrical measurements were performed in the presence of some gases of interest in polluting area (CO, NO2 and CH4), in breath analysis (ethanol) and in food control (ethylene). (C) 2003 Elsevier Science B.V All rights reserved.
7
info:eu-repo/semantics/article
262
E., Zampiceni; Comini, Elisabetta; Faglia, Guido; Sberveglieri, Giorgio; S., Kaciulis; L., Pandolfi; S., Viticoli
1 Contributo su Rivista::1.1 Articolo in rivista
none
1.1 Articolo in rivista
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11379/35234
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