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A Novel Pvd Technique For The Preparation Of Sno2 Thin-Films As C2h5oh Sensors

SBERVEGLIERI, Giorgio;FAGLIA, Guido;
1992-01-01
1992
Nessuno
PE3_5 Electronic properties of materials and transport
SENSORS AND ACTUATORS. B, CHEMICAL
sì
2-s2.0-0026835324
WOS:A1992HT65800076
Sì, ma tipo non specificato
Inglese
Internazionale
7
721
726
5
A sensor for ethyl alcohol, based on an SnO2 thin film, is described. This film is grown by means of sputtering with a novel technique, called RGTO (rheotaxial growth and thermal oxidation). The RGTO thin film with an ultra-thin layer of Pd shows a good sensitivity to ethyl alcohol in the temperature range 523-773 K and a high selectivity to CO, CH4, C3H8 and C4H10. The maximum value of the sensitivity, defined as the relative variation of conductance DELTA-G/G, is obtained at 650 K; it is equal to 150 for 1000 ppm of ethyl alcohol in synthetic air. The height of the Schottky barrier between adjacent grains is obtained by electrical measurements of the conductance stimulated by the temperature. The average height of the barrier as a function of the operating temperature shows a maximum at 773 K (eV(s) = 0.65 eV).
5
info:eu-repo/semantics/article
262
Sberveglieri, Giorgio; Faglia, Guido; S., Groppelli; P., Nelli; A., Taroni
1 Contributo su Rivista::1.1 Articolo in rivista
none
1.1 Articolo in rivista
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11379/35225
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