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Selective sublimation processing of thin films for gas sensing

COMINI, Elisabetta;FERRONI, Matteo;SBERVEGLIERI, Giorgio
2005-01-01
2005
Nessuno
PE3_5 Electronic properties of materials and transport
SENSORS AND ACTUATORS. B, CHEMICAL
sì
2-s2.0-19744379012
WOS:000230330300003
Sì, ma tipo non specificato
Inglese
Internazionale
108
15
20
5
The selective sublimation processing (SSP) is a useful and easy method for production of semiconducting thin films via reactive sputtering for gas sensing. We have investigated the mechanism of film growth and processing for an insight into the main parameters that control the preparation methodology. A model based on diffusion equation, in the framework of a linear theory, has been proposed and compared to experimental evidences. Rutherford backscattering spectrometry has been extensively used as a tool for determination of concentration profiles in the layers. The model allowed a deeper understanding of film preparation with a physical description of the processes involved, which would open up the design of innovative nanostructured materials that rely on SSP. Titania thin films produced by this methodology and proved capable of sensing target gases of interest for many applications. (c) 2004 Elsevier B.V. All rights reserved.
9
info:eu-repo/semantics/article
262
V., Guidi; G., Martinelli; G., Schiffrer; A., Vomiero; C., Scian; G. D., Mea; Comini, Elisabetta; Ferroni, Matteo; Sberveglieri, Giorgio
1 Contributo su Rivista::1.1 Articolo in rivista
none
1.1 Articolo in rivista
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11379/34086
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