Dispersion-optimized multicladding silicon nitride waveguides for nonlinear frequency generation from ultraviolet to mid-infrared

Nonlinear frequency conversion spanning from the ultraviolet to the mid-infrared (beyond 2.4 μm) is experimentally demonstrated in multicladding silicon nitride (SiXNY ) waveguides. By adjusting the waveguide cross-section the chromatic dispersion is flattened, which enhances both the efficiency and the bandwidth of the nonlinear conversion. How accurately the dispersion is tailored is assessed through chromatic dispersion measurements and an experiment/simulation comparison of the dispersive waves’ wavelength locations. Undesirable fluctuations of both the refractive index and the dimensions of the waveguide during the fabrication process result in a dispersion unpredictability of at least 20 ps/nm/km. Finally, manipulation of the effective refractive index allows for multiple third harmonic generated tones spanning from 381 to 715 nm.