Molybdenum-titanium (Mo-Ti) mixed oxide thin films were deposited by radio frequency (RF) sputtering and tested as gas sensors before and after oxidation cycles; their electrical responses toward different concentrations of ethanol vapours were measured. Transmission electron microscopy (TEM) was used to investigate the structural and morphological properties of the films and to correlate them to the electrical behaviour of the sensors. (C) 2003 Elsevier Science B.V All rights reserved.
Structural and electrical characterisation of molybdenum-titanium mixed oxides for ethanol sensing deposited by RF sputtering
COMINI, Elisabetta;SBERVEGLIERI, Giorgio
2003-01-01
Abstract
Molybdenum-titanium (Mo-Ti) mixed oxide thin films were deposited by radio frequency (RF) sputtering and tested as gas sensors before and after oxidation cycles; their electrical responses toward different concentrations of ethanol vapours were measured. Transmission electron microscopy (TEM) was used to investigate the structural and morphological properties of the films and to correlate them to the electrical behaviour of the sensors. (C) 2003 Elsevier Science B.V All rights reserved.File in questo prodotto:
File | Dimensione | Formato | |
---|---|---|---|
Structural and electrical characterisation of molybdenum-titanium mixed oxides for ethanol sensing deposited by RF sputtering.PDF
gestori archivio
Tipologia:
Full Text
Licenza:
DRM non definito
Dimensione
181.11 kB
Formato
Adobe PDF
|
181.11 kB | Adobe PDF | Visualizza/Apri Richiedi una copia |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.