Examples of piezoelectric MEMS (micro-electromechanical systems) developed to work as sensors, actuators and energy harvesting devices are presented. Specifically, a distance-independent contactlessly-interrogated piezoelectric microresonator has been developed to operate as a microbalance. Acoustic-wave piezoelectric microactuators have been investigated to centrifugate liquid drops in acoustofluidics applications and to operate as tunable sound transducers. A piezoelectric MEMS energy harvester which combines the multi-converter and nonlinear approaches has been proposed.
Piezoelectric MEMS for Sensors, Actuators and Energy Harvesting
Nastro A.;Bau' M.;Ferrari M.;Ferrari V.
2023-01-01
Abstract
Examples of piezoelectric MEMS (micro-electromechanical systems) developed to work as sensors, actuators and energy harvesting devices are presented. Specifically, a distance-independent contactlessly-interrogated piezoelectric microresonator has been developed to operate as a microbalance. Acoustic-wave piezoelectric microactuators have been investigated to centrifugate liquid drops in acoustofluidics applications and to operate as tunable sound transducers. A piezoelectric MEMS energy harvester which combines the multi-converter and nonlinear approaches has been proposed.File in questo prodotto:
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