Magnetically induced vibrations on a conductive cantilever for resonant microsensors

A conductive and non-magnetic cantilever, located in a time-changing magnetic field, is brought into resonance thanks to the interaction between the eddy currents and the external magnetic field. In order to exploit this effect for resonant sensors, an experimental set-up has been built and a simple theoretical analysis has been used to model the relevant features of the sensor by means of electro-magnetic-mechanical device simulations. Experimental results demonstrating the principle are reported.