This paper reports an innovative contactless MEMS-based microresonator actuated by an external time-varying magnetic field. The actuation principle is based on the interaction between the eddy currents and the magnetic field generated by an external inductor driven by a sinusoidal current; the system response is sensed via an inductive pick-up based on a high permeability material (100-mum of diameter) in order to detect the micromachined system resonance. The working principle and the experimental set-up are here described and some preliminary results are reported for a BESOI (bulk and etch silicon on insulator) crab-leg device.
Contactless electromagnetic interrogation of a mems-based microresonator used as passive sensing element
BAU', Marco;FERRARI, Vittorio;SARDINI, Emilio;SERPELLONI, MAURO;
2009-01-01
Abstract
This paper reports an innovative contactless MEMS-based microresonator actuated by an external time-varying magnetic field. The actuation principle is based on the interaction between the eddy currents and the magnetic field generated by an external inductor driven by a sinusoidal current; the system response is sensed via an inductive pick-up based on a high permeability material (100-mum of diameter) in order to detect the micromachined system resonance. The working principle and the experimental set-up are here described and some preliminary results are reported for a BESOI (bulk and etch silicon on insulator) crab-leg device.File in questo prodotto:
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